Abstract
Piezoelectric flextensional microactuators have been designed and fabricated using silicon micromachining techniques. A lead zirconate titanate (PZT) thin film is used as the piezoelectric actuator material. A fabrication process using five photolithography steps and a final release step has been developed. Static displacement of the actuators was measured using a white light interference microscope. Displacements in the range of 2.3-12.7 μm at 200 kV/cm for actuators with four different lengths were measured. From these measurements an amplification factor of 1.5 compared to unimorph actuator was deduced. Corresponding resonance frequencies in the range of 407- 32.6 kHz were obtained using an Agilent 4294A impedance analyzer in a vacuum ambient of 5×10 -4 mbar.
| Original language | English (US) |
|---|---|
| Article number | TPa33 |
| Pages (from-to) | 375-378 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| State | Published - 2005 |
| Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: Jan 30 2005 → Feb 3 2005 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering