@inproceedings{38da1ee03c484909adc014e6b7af64ab,
title = "MEMS lubrication by tribochemical reaction",
abstract = "A means of providing replenishable lubrication to rubbing silicon surfaces is demonstrated. Alcohol at a small fraction of saturation vapor pressure is introduced in a nitrogen environment. Pin-on-flat sliding experiments in this environment reveal a friction coefficient near 0.2, and absence of wear above a critical alcohol concentration. This lubrication approach was also demonstrated in microfabricated silicon machines, where the devices operated at least a factor of 104 longer without failure when alcohol vapor was present in the nitrogen gas environment, compared to devices in dry N2 with a chemisorbed monolayer alone. When water vapor was added to the environment, vapor lubrication by alcohol was inhibited at concentration ratios of water: alcohol = 2.5:1.",
author = "Dugger, \{Michael T.\} and Ohlhausen, \{James A.\} and Asay, \{David B.\} and Kim, \{Seong H.\}",
year = "2008",
doi = "10.1115/IJTC2007-44308",
language = "English (US)",
isbn = "0791848108",
series = "2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007",
pages = "873--875",
booktitle = "2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007",
note = "2007 ASME/STLE International Joint Tribology Conference, IJTC 2007 ; Conference date: 22-10-2007 Through 24-10-2007",
}