MEMS mirror array for a wavelength selective 1×K switch

D. López, F. Pardo, V. Aksyuk, M. E. Simon, H. R. Shea, D. M. Marom, D. T. Neilson, R. Cirelli, F. Klemens, W. Mansfield, L. Fetter, E. Bower, J. Miner, T. Sorsch

Research output: Contribution to journalConference articlepeer-review

8 Scopus citations


We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

Original languageEnglish (US)
Pages (from-to)445-455
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5116 II
StatePublished - 2003
EventSmart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain
Duration: May 19 2003May 21 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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