Abstract
We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.
Original language | English (US) |
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Pages (from-to) | 445-455 |
Number of pages | 11 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5116 II |
DOIs | |
State | Published - 2003 |
Event | Smart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain Duration: May 19 2003 → May 21 2003 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering