MEMS mirror array for a wavelength selective 1×K switch

D. López; F. Pardo; V. Aksyuk; M. E. Simon; H. R. Shea; D. M. Marom; D. T. Neilson; R. Cirelli; F. Klemens; W. Mansfield; L. Fetter; E. Bower; J. Miner; T. Sorsch

doi:10.1117/12.504381

MEMS mirror array for a wavelength selective 1×K switch

D. López
, F. Pardo
, V. Aksyuk
, M. E. Simon
, H. R. Shea
, D. M. Marom
, D. T. Neilson
, R. Cirelli
, F. Klemens
, W. Mansfield
, L. Fetter
, E. Bower
, J. Miner
, T. Sorsch

Research output: Contribution to journal › Conference article › peer-review

9 Scopus citations

Abstract

We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

Original language	English (US)
Pages (from-to)	445-455
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5116 II
DOIs	https://doi.org/10.1117/12.504381
State	Published - 2003
Event	Smart Sensors, Actuators, and MEMS - Maspalonas, Gran Canaria, Spain Duration: May 19 2003 → May 21 2003

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.504381

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López, D., Pardo, F., Aksyuk, V., Simon, M. E., Shea, H. R., Marom, D. M., Neilson, D. T., Cirelli, R., Klemens, F., Mansfield, W., Fetter, L., Bower, E., Miner, J., & Sorsch, T. (2003). MEMS mirror array for a wavelength selective 1×K switch. Proceedings of SPIE - The International Society for Optical Engineering, 5116 II, 445-455. https://doi.org/10.1117/12.504381

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title = "MEMS mirror array for a wavelength selective 1×K switch",

abstract = "We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100\% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.",

author = "D. L{\'o}pez and F. Pardo and V. Aksyuk and Simon, \{M. E.\} and Shea, \{H. R.\} and Marom, \{D. M.\} and Neilson, \{D. T.\} and R. Cirelli and F. Klemens and W. Mansfield and L. Fetter and E. Bower and J. Miner and T. Sorsch",

year = "2003",

doi = "10.1117/12.504381",

language = "English (US)",

volume = "5116 II",

pages = "445--455",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE",

note = "Smart Sensors, Actuators, and MEMS ; Conference date: 19-05-2003 Through 21-05-2003",

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TY - JOUR

T1 - MEMS mirror array for a wavelength selective 1×K switch

AU - López, D.

AU - Pardo, F.

AU - Aksyuk, V.

AU - Simon, M. E.

AU - Shea, H. R.

AU - Marom, D. M.

AU - Neilson, D. T.

AU - Cirelli, R.

AU - Klemens, F.

AU - Mansfield, W.

AU - Fetter, L.

AU - Bower, E.

AU - Miner, J.

AU - Sorsch, T.

PY - 2003

Y1 - 2003

N2 - We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

AB - We present a new MEMS mirror device that fulfills the requirements needed for its use in a wavelength selective switch. The MEMS device consists of a 1D array of individually controllable tilt micromirrors with almost 100% filling factor. Each mirror in the array is used to manipulate an individual wavelength channel, attenuating or redirecting it into a different output. The mirrors are electrostatically rotated around a fixed pivot and they use a novel concept of angle amplification to increase their out-of-plane angular rotation. A detailed analysis of their mechanical and optical response is presented.

UR - https://www.scopus.com/pages/publications/0041828561

UR - https://www.scopus.com/pages/publications/0041828561#tab=citedBy

U2 - 10.1117/12.504381

DO - 10.1117/12.504381

M3 - Conference article

AN - SCOPUS:0041828561

SN - 0277-786X

VL - 5116 II

SP - 445

EP - 455

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Smart Sensors, Actuators, and MEMS

Y2 - 19 May 2003 through 21 May 2003

ER -

MEMS mirror array for a wavelength selective 1×K switch

Abstract

All Science Journal Classification (ASJC) codes

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