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Mems spatial light modulator for optical maskless lithography
V. A. Aksyuk, D. López, G. P. Watson, M. E. Simon, R. A. Cirelli, F. Pardo, F. Klemens, A. R. Papazian, C. Bolle, J. E. Bower, E. Ferry, W. M. Mansfield, J. Miner, T. W. Sorsch, D. Tennant
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
1
Scopus
citations