MEMS stage and piezoelectric motor-controlled TEM holder for quantitative in-situ testing of thin film specimens

Scott Robinson, Glenn Fried, Aman Haque

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)1274-1275
Number of pages2
JournalMicroscopy and Microanalysis
Issue numberSUPPL. 2
StatePublished - 2002

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this