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MEMS stage and piezoelectric motor-controlled TEM holder for quantitative in-situ testing of thin film specimens

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)1274-1275
Number of pages2
JournalMicroscopy and Microanalysis
Volume8
Issue numberSUPPL. 2
DOIs
StatePublished - 2002

All Science Journal Classification (ASJC) codes

  • Instrumentation

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