Micro piezoelectric ultrasonic motors

K. Uchino; S. Cagatay; B. Koc; S. Dong; P. Bouchilloux; M. Strauss

doi:10.1007/s10832-004-5131-x

Micro piezoelectric ultrasonic motors

K. Uchino, S. Cagatay, B. Koc, S. Dong, P. Bouchilloux, M. Strauss

Materials Research Institute (MRI)

Research output: Contribution to journal › Article › peer-review

85 Scopus citations

Abstract

This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced; windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5 mm in diameter and 0.8 mN·m in torque have been actually developed.

Original language	English (US)
Pages (from-to)	393-401
Number of pages	9
Journal	Journal of Electroceramics
Volume	13
Issue number	1-3
DOIs	https://doi.org/10.1007/s10832-004-5131-x
State	Published - Jul 2004

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Mechanics of Materials
Materials Chemistry
Electrical and Electronic Engineering

Access to Document

10.1007/s10832-004-5131-x

Cite this

@article{c4f7b3075666485b8683013a57cc576b,

title = "Micro piezoelectric ultrasonic motors",

abstract = "This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced; windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5 mm in diameter and 0.8 mN·m in torque have been actually developed.",

author = "K. Uchino and S. Cagatay and B. Koc and S. Dong and P. Bouchilloux and M. Strauss",

note = "Funding Information: This work was partially supported by the Office of Naval Research through Contract No. N00014-96-1-1173.",

year = "2004",

month = jul,

doi = "10.1007/s10832-004-5131-x",

language = "English (US)",

volume = "13",

pages = "393--401",

journal = "Journal of Electroceramics",

issn = "1385-3449",

publisher = "Springer Netherlands",

number = "1-3",

}

TY - JOUR

T1 - Micro piezoelectric ultrasonic motors

AU - Uchino, K.

AU - Cagatay, S.

AU - Koc, B.

AU - Dong, S.

AU - Bouchilloux, P.

AU - Strauss, M.

N1 - Funding Information: This work was partially supported by the Office of Naval Research through Contract No. N00014-96-1-1173.

PY - 2004/7

Y1 - 2004/7

N2 - This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced; windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5 mm in diameter and 0.8 mN·m in torque have been actually developed.

AB - This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced; windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5 mm in diameter and 0.8 mN·m in torque have been actually developed.

UR - http://www.scopus.com/inward/record.url?scp=17044387707&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=17044387707&partnerID=8YFLogxK

U2 - 10.1007/s10832-004-5131-x

DO - 10.1007/s10832-004-5131-x

M3 - Article

AN - SCOPUS:17044387707

SN - 1385-3449

VL - 13

SP - 393

EP - 401

JO - Journal of Electroceramics

JF - Journal of Electroceramics

IS - 1-3

ER -

Micro piezoelectric ultrasonic motors

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this