Keyphrases
Silicon Wafer
100%
Raman Spectral Analysis
100%
Micro-Raman
100%
Subsurface Damage Depth
100%
Damaged Layer
100%
Subsurface Damage
33%
Wave number
16%
Stacking Faults
16%
Dislocation
16%
Raman Spectra
16%
Transmission Electron Microscopy
16%
Damage Depth
16%
Long Waves
16%
Gaussian Profile
16%
Micro-Raman Spectroscopy
16%
Band Shift
16%
Chemical Etching
16%
Transmission Electron Microscopy Observation
16%
Profile Shift
16%
Etching Depth
16%
Causes of Damage
16%
Engineering
Subsurface
100%
Silicon Wafer
100%
Transmissions
66%
Wave Number
33%
Raman Spectrum
33%
Gaussian Profile Beam
33%
Material Science
Transmission Electron Microscopy
100%
Silicon Wafer
100%
Micro-Raman Spectroscopy
50%
Stacking Fault
50%