Microelectromechanical system pressure sensor and method for making and using

Jeffery B. Fortin

Microelectromechanical system pressure sensor and method for making and using

Jeffery B. Fortin (Inventor)

Office of the Senior Vice President for Research

Research output: Patent

Abstract

According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.

Original language	English (US)
Patent number	US7296476B2
State	Published - Nov 20 2007

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title = "Microelectromechanical system pressure sensor and method for making and using",

abstract = "According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.",

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AB - According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.

M3 - Patent

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ER -

Microelectromechanical system pressure sensor and method for making and using

Abstract

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