Abstract
According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.
| Original language | English (US) |
|---|---|
| Patent number | US7296476B2 |
| State | Published - Nov 20 2007 |
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