Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films

L. P. Wang; K. Deng; L. Zou; R. Wolf; R. J. Davis; S. Trolier-McKinstry

doi:10.1109/55.992832

Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films

L. P. Wang, K. Deng, L. Zou, R. Wolf, R. J. Davis, S. Trolier-McKinstry

Research output: Contribution to journal › Article › peer-review

59 Scopus citations

Abstract

MEMS accelerometers based on piezoelectric lead zirconate titanate (PZT) thick films with annular diaphragm sensing structures were designed, fabricated, and tested. Theoretical and numerical models for this new inertial sensing structure are presented. The design provides good sensitivity along one axis, with low transverse sensitivity and good temperature stability. Test results show high sensitivities and broad usable frequency ranges. Measured sensitivities range from 0.77 to 7.6 pC/g for resonant frequencies from 35.3 kHz to 3.7 kHz. Reasonable agreement with theoretical values was obtained.

Original language	English (US)
Pages (from-to)	182-184
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	23
Issue number	4
DOIs	https://doi.org/10.1109/55.992832
State	Published - Apr 2002

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/55.992832

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title = "Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films",

abstract = "MEMS accelerometers based on piezoelectric lead zirconate titanate (PZT) thick films with annular diaphragm sensing structures were designed, fabricated, and tested. Theoretical and numerical models for this new inertial sensing structure are presented. The design provides good sensitivity along one axis, with low transverse sensitivity and good temperature stability. Test results show high sensitivities and broad usable frequency ranges. Measured sensitivities range from 0.77 to 7.6 pC/g for resonant frequencies from 35.3 kHz to 3.7 kHz. Reasonable agreement with theoretical values was obtained.",

author = "Wang, {L. P.} and K. Deng and L. Zou and R. Wolf and Davis, {R. J.} and S. Trolier-McKinstry",

note = "Funding Information: Manuscript received December 3, 2001; revised January 18, 2002. This work was supported by the National Institute of Standards and Technology under WR-ATP-0001, the Penn State Nanofabrication Facility, and the Cornell Nanofabrication Facility, which provided the DRIE tool. The review of this letter was arranged by Editor J. Sin.",

year = "2002",

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pages = "182--184",

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T1 - Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films

AU - Wang, L. P.

AU - Deng, K.

AU - Zou, L.

AU - Wolf, R.

AU - Davis, R. J.

AU - Trolier-McKinstry, S.

N1 - Funding Information: Manuscript received December 3, 2001; revised January 18, 2002. This work was supported by the National Institute of Standards and Technology under WR-ATP-0001, the Penn State Nanofabrication Facility, and the Cornell Nanofabrication Facility, which provided the DRIE tool. The review of this letter was arranged by Editor J. Sin.

PY - 2002/4

Y1 - 2002/4

N2 - MEMS accelerometers based on piezoelectric lead zirconate titanate (PZT) thick films with annular diaphragm sensing structures were designed, fabricated, and tested. Theoretical and numerical models for this new inertial sensing structure are presented. The design provides good sensitivity along one axis, with low transverse sensitivity and good temperature stability. Test results show high sensitivities and broad usable frequency ranges. Measured sensitivities range from 0.77 to 7.6 pC/g for resonant frequencies from 35.3 kHz to 3.7 kHz. Reasonable agreement with theoretical values was obtained.

AB - MEMS accelerometers based on piezoelectric lead zirconate titanate (PZT) thick films with annular diaphragm sensing structures were designed, fabricated, and tested. Theoretical and numerical models for this new inertial sensing structure are presented. The design provides good sensitivity along one axis, with low transverse sensitivity and good temperature stability. Test results show high sensitivities and broad usable frequency ranges. Measured sensitivities range from 0.77 to 7.6 pC/g for resonant frequencies from 35.3 kHz to 3.7 kHz. Reasonable agreement with theoretical values was obtained.

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Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films

Abstract

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