@inproceedings{7c0877b9ed104146a2e931a8cfd74ca6,
title = "Microfabrication of piezoelectric composite ultrasound transducers (PC-MUT)",
abstract = "In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) fabrication technology is presented. PMN-PT single crystal posts with side length of 14 μm and height of > 60 μm were fabricated using a deep dry etching method. High frequency (20-50 MHz) PMN-PT single crystal/epoxy 1-3 composites were prepared and the electromechanical coupling coefficient of the composites was ~ 0.72. Prototype 40 MHz ultrasound transducers showed promising sensitivity and bandwidth.",
author = "X. Jiang and Yuan, {J. R.} and A. Cheng and K. Snook and Cao, {P. J.} and Rehrig, {P. W.} and Hackenberger, {W. S.} and G. Lavalelle and X. Geng and Shrout, {T. R.}",
year = "2006",
doi = "10.1109/ULTSYM.2006.246",
language = "English (US)",
isbn = "1424402018",
series = "Proceedings - IEEE Ultrasonics Symposium",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "922--925",
booktitle = "2006 IEEE International Ultrasonics Symposium, IUS",
address = "United States",
note = "2006 IEEE International Ultrasonics Symposium, IUS ; Conference date: 03-10-2006 Through 06-10-2006",
}