Micromachined diaphragm transducers for miniaturised ultrasound arrays

Flavio Griggio, Christine E.M. Demore, Hyunsoo Kim, James Gigliotti, Yongqiang Qiu, Thomas N. Jackson, Kyusun Choi, Rick L. Tutwiler, Sandy Cochran, Susan Trolier-Mckinstry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Scopus citations


Miniaturised ultrasound transducer arrays with integrated electronics will in future enable significant advances in high resolution medical imaging and in acoustic tweezing for bioscience research. However, their development has been limited by challenges in scaling down conventional piezoelectric ultrasound transducer fabrication and interconnection techniques. Piezoelectric thin film transducers on silicon substrates can overcome these challenges by reducing dimensional constraints in fabrication and facilitating integration with electronics, including allowing low drive voltages in transmission. We present the design, fabrication and testing of diaphragm transducers to evaluate the feasibility of integrated piezoelectric micromachined ultrasonic transducers (PMUTs). Transducers have been designed, then fabricated with 80 μm and 130 μm diameter diaphragms, the latter in arrays with ∼500 diaphragms. Receive measurements demonstrate functionality of both devices, with pulse-echo bandwidths of approximately 90% for the 80 μm diaphragms, demonstrating initial feasibility for ultrasound imaging.

Original languageEnglish (US)
Title of host publication2012 IEEE International Ultrasonics Symposium, IUS 2012
StatePublished - 2012
Event2012 IEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany
Duration: Oct 7 2012Oct 10 2012

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727


Other2012 IEEE International Ultrasonics Symposium, IUS 2012

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics


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