@inproceedings{9a9d51f808c44334a28b273d6c420dca,
title = "Micromachined multifunctional piezoelectric T-beam transducers",
abstract = "This paper presents a novel MEMS piezoelectric cantilever beam with a T-shaped cross-section that can be used as both an actuator and a sensor. The micro T-beams are directly micromachined from bulk lead zirconate titanate (PZT) via deep reactive ion etching. The micromachined PZT T-beams are capable of in-plane and out-of-plane motion sensing and actuation via selective activation and measurements at different electrodes. The T-beam structures are tested as flexural actuators and also configured as accelerometers for sensing applications. Nine micromachined T-beams are fabricated and achieve up to 129 μm of out-of-plane displacement, 11.6 μm of in-plane displacement, 694 μN of out-of-plane blocking force, and an average acceleration sensitivity of 30.5 mV/g in 1-4.6 g{\textquoteright}s range at a frequency of 1.3 kHz.",
author = "Z. Zhang and K. Mateti and Rahn, {C. D.} and S. Tadigadapa",
note = "Funding Information: The authors would like to thank the Air Force Office of Scientific Research for their support of this work under grant #FA9550-07-1-0367. Publisher Copyright: {\textcopyright} 2010TRF.; 2010 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 06-06-2010 Through 10-06-2010",
year = "2010",
doi = "10.31438/trf.hh2010.65",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "246--249",
editor = "Monk, {David J.} and Turner, {Kimberly L.}",
booktitle = "2010 Solid-State Sensors, Actuators, and Microsystems Workshop",
}