Micromachined pmn-pt single crystal for advanced transducers

Xiaoning Jiang; Jian R. Yuan; An Cheng; Guy Lavallee; Paul Rehrig; Kevin Snook; Seongtae Kwon; Wesley Hackenberger; Jeffrey Catchmark; John McIntosh; Xuecang Geng

Micromachined pmn-pt single crystal for advanced transducers

Xiaoning Jiang
, Jian R. Yuan
, An Cheng
, Guy Lavallee
, Paul Rehrig
, Kevin Snook
, Seongtae Kwon
, Wesley Hackenberger
, Jeffrey Catchmark
, John McIntosh
, Xuecang Geng

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper a deep reactive ion etching (DRIE) process developed for the micromachining of bulk piezoelectrics is discussed. For the first time, a PMN-PT single crystal piezoelectric micro-array was fabricated with an array post cross section size of 14 µm x 14 µm, a height of >60 µm, and a spacing between microposts of about 2-6 µm. The etched single crystal piezoelectrics retained high piezoelectricity (d₃₃ ~2000 pC/N) and low dielectric loss (<0.01). Single crystal/epoxy 1-3 composites were fabricated using the etched micro-arrays and the electromechanical coupling coefficient of such piezoelectric composites was ~0.72, indicating promising applications such as micro-sensors, actuators and transducers.

Original language	English (US)
Title of host publication	2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
Editors	Leland Spangler, Thomas W. Kenny
Publisher	Transducer Research Foundation
Pages	384-387
Number of pages	4
ISBN (Electronic)	0964002469, 9780964002463
State	Published - 2006
Event	13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 - Hilton Head Island, United States Duration: Jun 4 2006 → Jun 8 2006

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference	13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
Country/Territory	United States
City	Hilton Head Island
Period	6/4/06 → 6/8/06

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering
Hardware and Architecture

Cite this

Jiang, X., Yuan, J. R., Cheng, A., Lavallee, G., Rehrig, P., Snook, K., Kwon, S., Hackenberger, W., Catchmark, J., McIntosh, J., & Geng, X. (2006). Micromachined pmn-pt single crystal for advanced transducers. In L. Spangler, & T. W. Kenny (Eds.), 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 (pp. 384-387). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.

Jiang, Xiaoning ; Yuan, Jian R. ; Cheng, An et al. / Micromachined pmn-pt single crystal for advanced transducers. 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006. editor / Leland Spangler ; Thomas W. Kenny. Transducer Research Foundation, 2006. pp. 384-387 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

@inproceedings{170c089d265e4658904ad6cdefd1b26e,

title = "Micromachined pmn-pt single crystal for advanced transducers",

abstract = "In this paper a deep reactive ion etching (DRIE) process developed for the micromachining of bulk piezoelectrics is discussed. For the first time, a PMN-PT single crystal piezoelectric micro-array was fabricated with an array post cross section size of 14 µm x 14 µm, a height of >60 µm, and a spacing between microposts of about 2-6 µm. The etched single crystal piezoelectrics retained high piezoelectricity (d33 \textasciitilde{}2000 pC/N) and low dielectric loss (<0.01). Single crystal/epoxy 1-3 composites were fabricated using the etched micro-arrays and the electromechanical coupling coefficient of such piezoelectric composites was \textasciitilde{}0.72, indicating promising applications such as micro-sensors, actuators and transducers.",

author = "Xiaoning Jiang and Yuan, \{Jian R.\} and An Cheng and Guy Lavallee and Paul Rehrig and Kevin Snook and Seongtae Kwon and Wesley Hackenberger and Jeffrey Catchmark and John McIntosh and Xuecang Geng",

note = "Publisher Copyright: {\textcopyright} 2006 TRF.; 13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 ; Conference date: 04-06-2006 Through 08-06-2006",

year = "2006",

language = "English (US)",

series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",

publisher = "Transducer Research Foundation",

pages = "384--387",

editor = "Leland Spangler and Kenny, \{Thomas W.\}",

booktitle = "2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006",

}

Jiang, X, Yuan, JR, Cheng, A, Lavallee, G, Rehrig, P, Snook, K, Kwon, S, Hackenberger, W, Catchmark, J, McIntosh, J & Geng, X 2006, Micromachined pmn-pt single crystal for advanced transducers. in L Spangler & TW Kenny (eds), 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 384-387, 13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006, Hilton Head Island, United States, 6/4/06.

Micromachined pmn-pt single crystal for advanced transducers. / Jiang, Xiaoning; Yuan, Jian R.; Cheng, An et al.
2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006. ed. / Leland Spangler; Thomas W. Kenny. Transducer Research Foundation, 2006. p. 384-387 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Micromachined pmn-pt single crystal for advanced transducers

AU - Jiang, Xiaoning

AU - Yuan, Jian R.

AU - Cheng, An

AU - Lavallee, Guy

AU - Rehrig, Paul

AU - Snook, Kevin

AU - Kwon, Seongtae

AU - Hackenberger, Wesley

AU - Catchmark, Jeffrey

AU - McIntosh, John

AU - Geng, Xuecang

PY - 2006

Y1 - 2006

N2 - In this paper a deep reactive ion etching (DRIE) process developed for the micromachining of bulk piezoelectrics is discussed. For the first time, a PMN-PT single crystal piezoelectric micro-array was fabricated with an array post cross section size of 14 µm x 14 µm, a height of >60 µm, and a spacing between microposts of about 2-6 µm. The etched single crystal piezoelectrics retained high piezoelectricity (d33 ~2000 pC/N) and low dielectric loss (<0.01). Single crystal/epoxy 1-3 composites were fabricated using the etched micro-arrays and the electromechanical coupling coefficient of such piezoelectric composites was ~0.72, indicating promising applications such as micro-sensors, actuators and transducers.

AB - In this paper a deep reactive ion etching (DRIE) process developed for the micromachining of bulk piezoelectrics is discussed. For the first time, a PMN-PT single crystal piezoelectric micro-array was fabricated with an array post cross section size of 14 µm x 14 µm, a height of >60 µm, and a spacing between microposts of about 2-6 µm. The etched single crystal piezoelectrics retained high piezoelectricity (d33 ~2000 pC/N) and low dielectric loss (<0.01). Single crystal/epoxy 1-3 composites were fabricated using the etched micro-arrays and the electromechanical coupling coefficient of such piezoelectric composites was ~0.72, indicating promising applications such as micro-sensors, actuators and transducers.

UR - https://www.scopus.com/pages/publications/67649302800

UR - https://www.scopus.com/pages/publications/67649302800#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:67649302800

T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

SP - 384

EP - 387

BT - 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006

A2 - Spangler, Leland

A2 - Kenny, Thomas W.

PB - Transducer Research Foundation

T2 - 13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006

Y2 - 4 June 2006 through 8 June 2006

ER -

Jiang X, Yuan JR, Cheng A, Lavallee G, Rehrig P, Snook K et al. Micromachined pmn-pt single crystal for advanced transducers. In Spangler L, Kenny TW, editors, 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006. Transducer Research Foundation. 2006. p. 384-387. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Micromachined pmn-pt single crystal for advanced transducers

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All Science Journal Classification (ASJC) codes

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