TY - GEN
T1 - Micromachined quartz resonator-based high performance thermal sensors
AU - Ren, Kailiang
AU - Pisani, Marcelo B.
AU - Kao, Ping
AU - Tadigadapa, Srinivas A.
PY - 2010/12/1
Y1 - 2010/12/1
N2 - This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited thermal sensors for infrared imaging and biochemical sensing applications. An integrated quartz sensor array using CMOS-compatible micromachining techniques has been designed and fabricated. 241 MHz micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.162 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz 1/2, detectivity D* of 9.17 × 107 cmHz 1/2/W, and noise equivalent temperature difference (NETD) in the 8-12 μm wavelength region of 4 mK and a response time of < 30 Hz. In a unique new application a remotely coupled thermal sensor configuration was used to monitor biochemical reactions in real time.
AB - This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited thermal sensors for infrared imaging and biochemical sensing applications. An integrated quartz sensor array using CMOS-compatible micromachining techniques has been designed and fabricated. 241 MHz micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.162 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz 1/2, detectivity D* of 9.17 × 107 cmHz 1/2/W, and noise equivalent temperature difference (NETD) in the 8-12 μm wavelength region of 4 mK and a response time of < 30 Hz. In a unique new application a remotely coupled thermal sensor configuration was used to monitor biochemical reactions in real time.
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U2 - 10.1109/ICSENS.2010.5690612
DO - 10.1109/ICSENS.2010.5690612
M3 - Conference contribution
AN - SCOPUS:79951877170
SN - 9781424481682
T3 - Proceedings of IEEE Sensors
SP - 2197
EP - 2201
BT - IEEE Sensors 2010 Conference, SENSORS 2010
T2 - 9th IEEE Sensors Conference 2010, SENSORS 2010
Y2 - 1 November 2010 through 4 November 2010
ER -