Micromachined quartz resonator-based high performance thermal sensors

Keyphrases

• High Performance 100%
• Micromachining 100%
• Quartz Resonator 100%
• Thermal Sensor 100%
• Temperature Sensitivity 66%
• Quartz Crystal 33%
• High Density 33%
• Sensing Applications 33%
• Resonator 33%
• Infrared Imaging 33%
• Wavelength Regions 33%
• Sensor Array 33%
• Response Time 33%
• Integration Method 33%
• Infrared Measurements 33%
• Micromachined Resonators 33%
• Heterogeneous Integration 33%
• Y-cut Quartz 33%
• Sensor Configuration 33%
• Crystal Cut 33%
• Biochemical Reactions 33%
• Thermal Conductance 33%
• Conductance Fluctuations 33%
• Noise Equivalent Power 33%
• Noise Equivalent Temperature Difference 33%
• Coupled Thermal 33%
• CMOS Technology 33%
• Micromachining Technique 33%

Engineering

• Thermal Sensor 100%
• Resonator 100%
• Biochemicals 50%
• Quartz Crystal 25%
• Sensor Array 25%
• Response Time 25%
• Integration Method 25%
• Sensing Application 25%
• Micro Machining 25%
• Equivalent Temperature 25%

Material Science

• Resonator 100%
• Density 25%
• Micromachining 25%