TY - JOUR
T1 - Micromachined quartz resonator based infrared detector array
AU - Kao, Ping
AU - Tadigadapa, Srinivas
N1 - Funding Information:
Srinivas Tadigadapa is an Associate Professor of Electrical Engineering at the Pennsylvania State University. He obtained his MS from Indian Institute of Technology, Chennai and Ph.D. from the University of Cambridge, UK in 1994. 1996-2000 he was Vice President of Manufacturing at Integrated Sensing Systems Inc., and was involved with the design, fabrication, packaging, reliability, and manufacturing of silicon microsystems. His research interests include microsystems and exploring phenomenon at the micro-nano interface. He has been a research fellow at the University of Karlsruhe, Germany and a Visiting Professor at Otto von Guericke University, Magdeburg, Germany, and University College, Cork, Ireland. He has been the recipient of the Alexander von Humboldt fellowship in Germany and the Walton Fellowship by the Science Foundation of Ireland. He is a member of the IEEE, The Institute of Physics, The Society of Photonics and Optical Engineering (SPIE).
Funding Information:
The authors would like to acknowledge financial support from the US Army Research Office (Grant # W911NF-07-1-0327) and the use of facilities at the PSU Site of the NSF NNIN under Agreement 0335765.
PY - 2009/2/16
Y1 - 2009/2/16
N2 - We report the fabrication and performance of a micromachined Y-cut quartz resonator based thermal infrared detector array. 1 mm diameter and 18 μm thick (90 MHz) inverted mesa configuration quartz resonator arrays with excellent resonance characteristics have been fabricated by RIE etching of quartz. Temperature sensitivity of 7.2 kHz/K was experimentally measured. Infrared calibration tests on the resonator array even without the use of infrared absorbers gave a responsivity of 14.3 MHz/W and an NEP of 326 nW. In this first report on the performance of the Y-cut quartz resonator infrared thermal detector array, the response time measurements were found to be limited by the slow measurement time of the impedance scans and the undesired heating of the quartz substrate. Most importantly, this initial work demonstrates the possibility of realizing infrared detector arrays for room temperature thermal imaging applications that can rival current state of the art in the field.
AB - We report the fabrication and performance of a micromachined Y-cut quartz resonator based thermal infrared detector array. 1 mm diameter and 18 μm thick (90 MHz) inverted mesa configuration quartz resonator arrays with excellent resonance characteristics have been fabricated by RIE etching of quartz. Temperature sensitivity of 7.2 kHz/K was experimentally measured. Infrared calibration tests on the resonator array even without the use of infrared absorbers gave a responsivity of 14.3 MHz/W and an NEP of 326 nW. In this first report on the performance of the Y-cut quartz resonator infrared thermal detector array, the response time measurements were found to be limited by the slow measurement time of the impedance scans and the undesired heating of the quartz substrate. Most importantly, this initial work demonstrates the possibility of realizing infrared detector arrays for room temperature thermal imaging applications that can rival current state of the art in the field.
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U2 - 10.1016/j.sna.2008.11.013
DO - 10.1016/j.sna.2008.11.013
M3 - Article
AN - SCOPUS:58949094486
SN - 0924-4247
VL - 149
SP - 189
EP - 192
JO - Sensors and Actuators, A: Physical
JF - Sensors and Actuators, A: Physical
IS - 2
ER -