Micromachined Reactors for Catalytic Partial Oxidation Reactions

Ravi Srinivasan, I. Ming Hsing, Peter E. Berger, Klavs F. Jensen, Samara L. Firebaugh, Martin A. Schmidt, Michael P. Harold, Jan J. Lerou, James F. Ryley

Research output: Contribution to journalArticlepeer-review

243 Scopus citations


Silicon-based microfabrication of a novel chemical reactor (microreactor) having submillimeter flow channels with integrated heaters, and flow and temperature sensors is described. The potential application of this reactor to partial-oxidation reactions is explored by using Pt-catalyzed NH3 oxidation as a model reaction. Investigation of reactor behavior as a function of operating conditions shows that conversion and selectivity behavior of conventional laboratory reactors can be reproduced and demonstrates the feasibility of conducting chemical reactions in microfabricated systems. Ignition-extinction behavior is explored, along with high-temperature microreactor materials degradation. Potential applications and scale-up of microreactors are also discussed.

Original languageEnglish (US)
Pages (from-to)3059-3069
Number of pages11
JournalAIChE Journal
Issue number11
StatePublished - Nov 1997

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Environmental Engineering
  • General Chemical Engineering


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