Abstract
Silicon-based microfabrication of a novel chemical reactor (microreactor) having submillimeter flow channels with integrated heaters, and flow and temperature sensors is described. The potential application of this reactor to partial-oxidation reactions is explored by using Pt-catalyzed NH3 oxidation as a model reaction. Investigation of reactor behavior as a function of operating conditions shows that conversion and selectivity behavior of conventional laboratory reactors can be reproduced and demonstrates the feasibility of conducting chemical reactions in microfabricated systems. Ignition-extinction behavior is explored, along with high-temperature microreactor materials degradation. Potential applications and scale-up of microreactors are also discussed.
Original language | English (US) |
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Pages (from-to) | 3059-3069 |
Number of pages | 11 |
Journal | AIChE Journal |
Volume | 43 |
Issue number | 11 |
DOIs | |
State | Published - Nov 1997 |
All Science Journal Classification (ASJC) codes
- Biotechnology
- Environmental Engineering
- General Chemical Engineering