@inproceedings{754f361b26b94692ad8997fc07db59b6,
title = "Micromirror-based manipulation of synchrotron X-ray beams",
abstract = "Synchrotron beamlines typically use macroscopic, quasi-static optics to manipulate x-ray beams. We present the use of dynamic microelectromechanical systems-based optics (MEMS) to temporally modulate synchrotron x-ray beams. We demonstrate this concept using single-crystal torsional MEMS micromirrors oscillating at frequencies of 75 kHz. Such a MEMS micromirror, with lateral dimensions of a few hundred micrometers, can interact with x rays by operating in grazing-incidence reflection geometry; x rays are deflected only when an x-ray pulse is incident on the rotating micromirror under appropriate conditions, i.e., at an angle less than the critical angle for reflectivity. The time window for such deflections depends on the frequency and amplitude of the MEMS rotation. We demonstrate that reflection geometry can produce a time window of a few microseconds. We further demonstrate that MEMS optics can isolate x rays from a selected synchrotron bunch or group of bunches. With ray-trace simulations we explain the currently achievable time windows and suggest a path toward improvements.",
author = "Walko, {D. A.} and Pice Chen and Jung, {I. W.} and D. Lopez and Schwartz, {C. P.} and Shenoy, {G. K.} and Jin Wang",
note = "Funding Information: This research used resources of the Advanced Photon Source and Center for Nanoscale Materials, U.S. Department of Energy (DOE) Office of Science User Facilities operated for the DOE Office of Science by Argonne National Laboratory under Contract No. DE-AC02-06CH11357. Publisher Copyright: {\textcopyright} 2017 SPIE.; Advances in X-Ray/EUV Optics and Components XII 2017 ; Conference date: 08-08-2017 Through 09-08-2017",
year = "2017",
doi = "10.1117/12.2274422",
language = "English (US)",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Christian Morawe and Khounsary, {Ali M.} and Shunji Goto",
booktitle = "Advances in X-Ray/EUV Optics and Components XII",
address = "United States",
}