Microscopic origin of the light-induced defects in hydrogenated nitrogen-rich amorphous silicon nitride films

J. Kanicki, W. L. Warren, C. H. Seager, M. S. Crowder, P. M. Lenahan

Research output: Contribution to journalArticlepeer-review

48 Scopus citations

Fingerprint

Dive into the research topics of 'Microscopic origin of the light-induced defects in hydrogenated nitrogen-rich amorphous silicon nitride films'. Together they form a unique fingerprint.

Keyphrases

Material Science