Microscopic origin of the light-induced defects in hydrogenated nitrogen-rich amorphous silicon nitride films

  • J. Kanicki
  • , W. L. Warren
  • , C. H. Seager
  • , M. S. Crowder
  • , P. M. Lenahan

Research output: Contribution to journal › Article › peer-review

49 Scopus citations

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Material Science