TY - GEN
T1 - Microstructure and interfaces of thin film capacitors on base metal foils
AU - Dechakupt, T.
AU - Yang, G.
AU - Reaney, I. M.
AU - Randall, C. A.
AU - Trolier-McKinstry, S.
PY - 2008
Y1 - 2008
N2 - The microstructure and interface quality of chemical solution deposited barium titanate thin films on Ni foil were studied. Cross-sectional transmission electron microscopy shows that a ∼200 nm thick barium titanate film annealed in a controlled oxygen partial pressure consists of equiaxed grains with grain size range of 24-75 nm (∼ 42 nm average). NiO was detected after re-oxidation by X-ray diffraction, but not by transmission electron microscopy, suggesting that the oxide is not a continuous barrier layer, but is spatially distributed in the films. Oxygen non-stoichiometry and the existence of C in barium titanate films were observed by electron energy loss spectrometry. In addition, it was found that there is a 5-8 nm thick Ni-Ba alloy developed at the interface between the barium titanate film and Ni foil.
AB - The microstructure and interface quality of chemical solution deposited barium titanate thin films on Ni foil were studied. Cross-sectional transmission electron microscopy shows that a ∼200 nm thick barium titanate film annealed in a controlled oxygen partial pressure consists of equiaxed grains with grain size range of 24-75 nm (∼ 42 nm average). NiO was detected after re-oxidation by X-ray diffraction, but not by transmission electron microscopy, suggesting that the oxide is not a continuous barrier layer, but is spatially distributed in the films. Oxygen non-stoichiometry and the existence of C in barium titanate films were observed by electron energy loss spectrometry. In addition, it was found that there is a 5-8 nm thick Ni-Ba alloy developed at the interface between the barium titanate film and Ni foil.
UR - http://www.scopus.com/inward/record.url?scp=62949247701&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=62949247701&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/amr.55-57.917
DO - 10.4028/www.scientific.net/amr.55-57.917
M3 - Conference contribution
AN - SCOPUS:62949247701
SN - 0878493565
SN - 9780878493562
T3 - Advanced Materials Research
SP - 917
EP - 920
BT - Smart Materials - International Conference on Smart Materials Smart/Intelligent Materials and Nanotechnology, (Smartmat-'08) and the 2nd International Workshop on Functional Materials and Nanomaterial
PB - Trans Tech Publications
T2 - International Conference on Smart Materials-Smart/Intelligent Materials and Nano Technology, (SmartMat-'08) and 2nd International Workshop on Functional Materials and Nanomaterials (IWOFM-2)
Y2 - 22 April 2008 through 25 April 2008
ER -