The C-Ti simultaneous ion implantation test on Fe was carried out in TITAN ion implantation system by cathode combination method. The microstructure of Fe after ion implantation was observed by transmission electron microscopy. It was found that Fe3C phase was formed by C ion implantation, while non-equilibrium phases such as Fe5C2 and Fe2C were formed by C-Ti simultaneous ion implantation.
|Number of pages
|Weixi Jiagong Jishu/Microfabrication Technology
|Published - Sep 1993
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering