Microstructure of Fe by C-Ti simultaneous ion implantation

Guoqing Li, Dehe Wang, Tao Zhang, Bangzhi Liu, Xiaolei Xu, Zukun Hei

Research output: Contribution to journalArticlepeer-review


The C-Ti simultaneous ion implantation test on Fe was carried out in TITAN ion implantation system by cathode combination method. The microstructure of Fe after ion implantation was observed by transmission electron microscopy. It was found that Fe3C phase was formed by C ion implantation, while non-equilibrium phases such as Fe5C2 and Fe2C were formed by C-Ti simultaneous ion implantation.

Original languageEnglish (US)
Pages (from-to)28-32
Number of pages5
JournalWeixi Jiagong Jishu/Microfabrication Technology
Issue number3
StatePublished - Sep 1993

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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