Abstract
Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g per root Hz or less between 10 and 200 Hz, and close to 10-8 g per root Hz near the resonant frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 grams.
Original language | English (US) |
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Pages | 675-678 |
Number of pages | 4 |
State | Published - 1995 |
Event | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: Jun 25 1995 → Jun 29 1995 |
Other
Other | Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) |
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City | Stockholm, Sweden |
Period | 6/25/95 → 6/29/95 |
All Science Journal Classification (ASJC) codes
- Engineering(all)