Miniature, high-sensitivity, electron tunneling accelerometer

Howard K. Rockstad; J. K. Reynolds; T. K. Tang; T. W. Kenny; W. J. Kaiser; Thomas B. Gabrielson

Miniature, high-sensitivity, electron tunneling accelerometer

Howard K. Rockstad
, J. K. Reynolds
, T. K. Tang
, T. W. Kenny
, W. J. Kaiser
, Thomas B. Gabrielson

Research output: Contribution to conference › Paper › peer-review

Abstract

Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10^-7 g per root Hz or less between 10 and 200 Hz, and close to 10^-8 g per root Hz near the resonant frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm³ volume with a mass of 8 grams.

Original language	English (US)
Pages	675-678
Number of pages	4
State	Published - 1995
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: Jun 25 1995 → Jun 29 1995

Other

Other	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
City	Stockholm, Sweden
Period	6/25/95 → 6/29/95

All Science Journal Classification (ASJC) codes

General Engineering

Cite this

@conference{f3d3f62416654fbdaf6d825c53888833,

title = "Miniature, high-sensitivity, electron tunneling accelerometer",

abstract = "Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g per root Hz or less between 10 and 200 Hz, and close to 10-8 g per root Hz near the resonant frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 grams.",

author = "Rockstad, \{Howard K.\} and Reynolds, \{J. K.\} and Tang, \{T. K.\} and Kenny, \{T. W.\} and Kaiser, \{W. J.\} and Gabrielson, \{Thomas B.\}",

year = "1995",

language = "English (US)",

pages = "675--678",

note = "Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) ; Conference date: 25-06-1995 Through 29-06-1995",

}

TY - CONF

T1 - Miniature, high-sensitivity, electron tunneling accelerometer

AU - Rockstad, Howard K.

AU - Reynolds, J. K.

AU - Tang, T. K.

AU - Kenny, T. W.

AU - Kaiser, W. J.

AU - Gabrielson, Thomas B.

PY - 1995

Y1 - 1995

N2 - Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g per root Hz or less between 10 and 200 Hz, and close to 10-8 g per root Hz near the resonant frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 grams.

AB - Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g per root Hz or less between 10 and 200 Hz, and close to 10-8 g per root Hz near the resonant frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 grams.

UR - https://www.scopus.com/pages/publications/0029490521

UR - https://www.scopus.com/pages/publications/0029490521#tab=citedBy

M3 - Paper

AN - SCOPUS:0029490521

SP - 675

EP - 678

T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Miniature, high-sensitivity, electron tunneling accelerometer

Abstract

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All Science Journal Classification (ASJC) codes

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