Mist deposition for TFT technology

K. Shanmugasundaram, S. C. Price, K. Chang, D. O. Lee, J. Ruzyllo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

In this work the process of mist deposition is explored as a method used to deposit organic semiconductors and gate dielectrics for TFTs. With an expanding use of TFTs in both electronic and photonic applications mist deposition offers advantages in terms of versatility, throughput and process cost. The method of mist deposition is first introduced and then example of results obtained with mist deposited dielectric and semiconductors thin films are discussed. copyright The Electrochemical Society.

Original languageEnglish (US)
Title of host publicationThin Film Transistor Technology
PublisherElectrochemical Society Inc.
Pages255-259
Number of pages5
Edition8
ISBN (Electronic)1566775086
DOIs
StatePublished - 2006
EventThin Film Transistor Technologies 8 - 210th Electrochemical Society Meeting - Cancun, Mexico
Duration: Oct 29 2006Nov 3 2006

Publication series

NameECS Transactions
Number8
Volume3
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

OtherThin Film Transistor Technologies 8 - 210th Electrochemical Society Meeting
Country/TerritoryMexico
CityCancun
Period10/29/0611/3/06

All Science Journal Classification (ASJC) codes

  • General Engineering

Fingerprint

Dive into the research topics of 'Mist deposition for TFT technology'. Together they form a unique fingerprint.

Cite this