Keyphrases
Pulsed Laser Deposition
100%
Mn-doped
100%
Piezoelectric Film
100%
X Ray Diffraction
33%
Temperature Data
33%
Room Temperature
33%
Permittivity
33%
PbTiO3
33%
Piezoelectric Coefficient
33%
Si Substrate
33%
Phase-pure
33%
Transition Temperature
33%
Substrate Temperature
33%
P-type
33%
Coercive Field
33%
Undoped
33%
Remanent Polarization
33%
Mn Doping
33%
Phase Transition Temperature
33%
Doping Level
33%
TiO2-SiO2
33%
Ferroelectric Transition
33%
Mn(III)
33%
Dielectric Loss Tangent
33%
X-ray Phase
33%
Perovskite Film
33%
Doped Films
33%
Field Polarization
33%
Post-deposition Annealing
33%
Ti Sites
33%
Material Science
Film
100%
Piezoelectricity
100%
Pulsed Laser Deposition
100%
X-Ray Diffraction
16%
Permittivity
16%
Dielectric Material
16%
Ferroelectric Material
16%
Annealing
16%