Modeling and characterization of atomically sharp "perfect" Ge/SiC2 interfaces

Wolfgang Windl, Tao Liang, Sergei Lopatin, Gerd Duscher

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


We have shown that oxidation of germanium-implanted Si can produce a pile-up of Ge in front of the oxidation front and produce an atomically-sharp interface. In this paper, we examine band-structure and processing of such an interface. Based on ab-initio calculations, the band structure of the sharp interface seems to be more favorable for use in electronic devices than the usually diffuse interface in Si/SiC2. Furthermore, we propose an ab-initio based Monte-Carlo model to simulate oxidation of SiGe alloys. The model explains the formation of the sharp interface due to the repulsive interaction between O and Ge. Furthermore, inclusion of Ge into the oxide is predicted for higher Ge concentrations, in agreement with experiment.

Original languageEnglish (US)
Pages (from-to)156-161
Number of pages6
JournalMaterials Science and Engineering B: Solid-State Materials for Advanced Technology
Issue numberSPEC. ISS.
StatePublished - Dec 15 2004

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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