Abstract
A shielded-differential annular through-silicon via (SD-ATSV) is proposed and investigated. The equivalent circuit model is developed with the influence of the electrically floating silicon substrate taken into account. By virtue of the circuit model, the frequency-and time-domain electrical characterizations of the SD-ATSV are conducted. Furthermore, the thermo-mechanical stress of the SD-ATSV is captured and compared with that of the shielded-differential cylindrical through-silicon via. It is demonstrated that by utilizing the SD-ATSV, the keep-out zone can be reduced without performance degradation.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 33238-33250 |
| Number of pages | 13 |
| Journal | IEEE Access |
| Volume | 6 |
| DOIs | |
| State | Published - Jun 12 2018 |
All Science Journal Classification (ASJC) codes
- General Computer Science
- General Materials Science
- General Engineering