Modeling and simulating optical MEMS using Chatoyant

Timothy P. Kurzweg; Steven P. Levitan; Philippe J. Marchand; Jose A. Martinez; Kurt R. Prough; Donald M. Chiarulli

doi:10.1117/12.341207

Modeling and simulating optical MEMS using Chatoyant

Timothy P. Kurzweg, Steven P. Levitan, Philippe J. Marchand, Jose A. Martinez, Kurt R. Prough, Donald M. Chiarulli

School of Engineering (Behrend)

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

The use of MEMs technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our opto-electronic system CAD tool, Chatoyant, to attempt to meet the needs of optical MEMS designers. This paper presents new component models and analysis techniques which extend our tool to support optical MEMS design. We demonstrate these extensions with the analysis of a micro-optical high speed FFT engine and a 1×2 optical MEM interferometer switch.

Original language	English (US)
Pages (from-to)	238-248
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3680
Issue number	I
DOIs	https://doi.org/10.1117/12.341207
State	Published - 1999
Event	Proceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS - Paris Duration: Mar 30 1999 → Apr 1 1999

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.341207

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title = "Modeling and simulating optical MEMS using Chatoyant",

abstract = "The use of MEMs technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our opto-electronic system CAD tool, Chatoyant, to attempt to meet the needs of optical MEMS designers. This paper presents new component models and analysis techniques which extend our tool to support optical MEMS design. We demonstrate these extensions with the analysis of a micro-optical high speed FFT engine and a 1×2 optical MEM interferometer switch.",

author = "Kurzweg, {Timothy P.} and Levitan, {Steven P.} and Marchand, {Philippe J.} and Martinez, {Jose A.} and Prough, {Kurt R.} and Chiarulli, {Donald M.}",

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AU - Kurzweg, Timothy P.

AU - Levitan, Steven P.

AU - Marchand, Philippe J.

AU - Martinez, Jose A.

AU - Prough, Kurt R.

AU - Chiarulli, Donald M.

PY - 1999

Y1 - 1999

N2 - The use of MEMs technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our opto-electronic system CAD tool, Chatoyant, to attempt to meet the needs of optical MEMS designers. This paper presents new component models and analysis techniques which extend our tool to support optical MEMS design. We demonstrate these extensions with the analysis of a micro-optical high speed FFT engine and a 1×2 optical MEM interferometer switch.

AB - The use of MEMs technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our opto-electronic system CAD tool, Chatoyant, to attempt to meet the needs of optical MEMS designers. This paper presents new component models and analysis techniques which extend our tool to support optical MEMS design. We demonstrate these extensions with the analysis of a micro-optical high speed FFT engine and a 1×2 optical MEM interferometer switch.

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JF - Proceedings of SPIE - The International Society for Optical Engineering

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ER -

Modeling and simulating optical MEMS using Chatoyant

Abstract

All Science Journal Classification (ASJC) codes

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