Modeling and simulating optical MEMS using Chatoyant

Timothy P. Kurzweg, Steven P. Levitan, Philippe J. Marchand, Jose A. Martinez, Kurt R. Prough, Donald M. Chiarulli

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


The use of MEMs technology has enabled the fabrication of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our opto-electronic system CAD tool, Chatoyant, to attempt to meet the needs of optical MEMS designers. This paper presents new component models and analysis techniques which extend our tool to support optical MEMS design. We demonstrate these extensions with the analysis of a micro-optical high speed FFT engine and a 1×2 optical MEM interferometer switch.

Original languageEnglish (US)
Pages (from-to)238-248
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Issue numberI
StatePublished - 1999
EventProceedings of the 1999 Design, Test, and Microfabrication of MEMS and MOEMS - Paris
Duration: Mar 30 1999Apr 1 1999

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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