TY - GEN
T1 - Modeling and simulation of milling frozen biological samples by focused ion beam
AU - Fu, Jing
AU - Catchmark, Jeffrey M.
AU - Joshi, Sanjay B.
N1 - Funding Information:
This work was supported by the Army Research Oce under Grants DAAH -04-95-10174, DAAH -04-96-10297, and DAAH 04-96-1-0398, by the Army Research Laboratory under contract number DAAL01-97-K0135, by an NSF Young Investigator award IRI-93-57756, and by an award from Lockheed Martin Advanced Technology Labs. We would like to thank the anonymous reviewers for pointing out a bug in an earlier version of the paper and for a number of useful comments.
PY - 2008
Y1 - 2008
N2 - Focused Ion Beam (FIB) has been used widely for sample preparation in material research and nanoscale device fabrication. The introduction of FIB system to biological samples preparation, especially for frozen samples, provides the potential to produce delicate submicron geometries on the samples, as well as the potential to be fully digitally controlled. In this paper, we first study the ion interactions with water and different cryoprotectants, and the sputtering yields under different conditions are estimated as the milling rate. A geometric simulation model is also proposed which can be used as a process planning tool to perform cryo-sectioning by FIB. Finally, discussions and suggestions for future work are presented.
AB - Focused Ion Beam (FIB) has been used widely for sample preparation in material research and nanoscale device fabrication. The introduction of FIB system to biological samples preparation, especially for frozen samples, provides the potential to produce delicate submicron geometries on the samples, as well as the potential to be fully digitally controlled. In this paper, we first study the ion interactions with water and different cryoprotectants, and the sputtering yields under different conditions are estimated as the milling rate. A geometric simulation model is also proposed which can be used as a process planning tool to perform cryo-sectioning by FIB. Finally, discussions and suggestions for future work are presented.
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U2 - 10.1115/DETC2007-35209
DO - 10.1115/DETC2007-35209
M3 - Conference contribution
AN - SCOPUS:44849118420
SN - 0791848027
SN - 9780791848029
SN - 0791848043
SN - 9780791848043
T3 - 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
SP - 905
EP - 912
BT - 2007 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC2007
T2 - 19th Int. Conf. Design Theory and Methodology and 1st Int. Conf. Micro and Nano Systems, presented at - 2007 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2007
Y2 - 4 September 2007 through 7 September 2007
ER -