Modeling of self-aligned vertical ZnO thin-film transistors

Kaige G. Sun, Shelby F. Nelson, Thomas N. Jackson

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


Vertical zinc oxide (ZnO) thin-film transistors (TFTs) with submicrometer channel length have good performance, including large current density (>10 mA/mm), high mobility (> 14 cm 2/Vs), and large current ON-OFF ratio ( >107). They also have asymmetric current-voltage ( I-V ) characteristics in the saturation region when the source and drain electrodes are interchanged. We have used 2-D simulations with the Synopsis Sentaurus Device to model vertical ZnO TFTs. The devices studied in this paper had ZnO active layers deposited using spatial atomic layer deposition (SALD). Model parameters were calibrated by matching simulation results with experimental results of planar bottom-gate ZnO TFTs and further adjusted to fit vertical TFT (VTFT) experimental characteristics. We find we need acceptor-like traps above and below the conduction band minimum to model the SALD ZnO semiconductor behavior; in this paper, we introduced these as bulk traps. We find the asymmetric $I$-$V$ characteristics arise from an ungated region near the foot of the VTFT, and which has a more significant effect on charge injection than on charge extraction. Modeling TFTs with different ungated region lengths gave good agreement with experimental characteristics.

Original languageEnglish (US)
Article number7088565
Pages (from-to)1912-1917
Number of pages6
JournalIEEE Transactions on Electron Devices
Issue number6
StatePublished - Jun 1 2015

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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