Modeling of silicon wafer vibration in semiconductor process tools

Engineering

• Silicon Wafer 100%
• Excitation Frequency 50%
• Mm Diameter 50%
• Excitation Condition 50%
• Cleanroom 50%

Material Science

• Silicon Wafer 100%

Keyphrases

• Particle Generation 25%
• 200 Mm Wafers 12%
• Wafer Size 12%
• Wafer Behavior 12%
• 300 Mm Wafer 12%