TY - GEN
T1 - Modeling perturbations induced in plate resonator characteristics due to flexural bending
AU - Hatipoglu, Gokhan
AU - Tadigadapa, Srinivas
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/12/12
Y1 - 2014/12/12
N2 - In this work, the changes in frequency occurring in thickness-shear mode quartz resonators due to bending are discussed and modeled. First order strain gradients and second and third order elastic coefficients for micromachined thin plate quartz resonators are important in the calculation of the frequency shifts. These gradients and coefficients are summarized and derived using Lee's theory. This theory is later combined with quartz/magnetostrictive layer unimorphs, where the tip deflection formulations are given. As a case study, the theoretical frequency shifts in a micromachined quartz resonator laminated with magnetostrictive thin film is calculated and later compared with experimental data. The combined model fits well with the experiments.
AB - In this work, the changes in frequency occurring in thickness-shear mode quartz resonators due to bending are discussed and modeled. First order strain gradients and second and third order elastic coefficients for micromachined thin plate quartz resonators are important in the calculation of the frequency shifts. These gradients and coefficients are summarized and derived using Lee's theory. This theory is later combined with quartz/magnetostrictive layer unimorphs, where the tip deflection formulations are given. As a case study, the theoretical frequency shifts in a micromachined quartz resonator laminated with magnetostrictive thin film is calculated and later compared with experimental data. The combined model fits well with the experiments.
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U2 - 10.1109/ICSENS.2014.6985337
DO - 10.1109/ICSENS.2014.6985337
M3 - Conference contribution
AN - SCOPUS:84931024665
T3 - Proceedings of IEEE Sensors
SP - 1652
EP - 1655
BT - IEEE SENSORS 2014, Proceedings
A2 - Arregui, Francisco J.
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 13th IEEE SENSORS Conference, SENSORS 2014
Y2 - 2 November 2014 through 5 November 2014
ER -