Modeling perturbations induced in plate resonator characteristics due to flexural bending

Gokhan Hatipoglu, Srinivas Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


In this work, the changes in frequency occurring in thickness-shear mode quartz resonators due to bending are discussed and modeled. First order strain gradients and second and third order elastic coefficients for micromachined thin plate quartz resonators are important in the calculation of the frequency shifts. These gradients and coefficients are summarized and derived using Lee's theory. This theory is later combined with quartz/magnetostrictive layer unimorphs, where the tip deflection formulations are given. As a case study, the theoretical frequency shifts in a micromachined quartz resonator laminated with magnetostrictive thin film is calculated and later compared with experimental data. The combined model fits well with the experiments.

Original languageEnglish (US)
Title of host publicationIEEE SENSORS 2014, Proceedings
EditorsFrancisco J. Arregui
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages4
ISBN (Electronic)9781479901616
StatePublished - Dec 12 2014
Event13th IEEE SENSORS Conference, SENSORS 2014 - Valencia, Spain
Duration: Nov 2 2014Nov 5 2014

Publication series

NameProceedings of IEEE Sensors
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229


Other13th IEEE SENSORS Conference, SENSORS 2014

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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