Molding of high aspect ratio ferroelectric microstructures

I. G. Mina; S. S.N. Bharadwaja; J. Raviprakash; S. Trolier-McKinstry; N. Saldanha; T. Mayer

Molding of high aspect ratio ferroelectric microstructures

I. G. Mina, S. S.N. Bharadwaja, J. Raviprakash, S. Trolier-McKinstry, N. Saldanha, T. Mayer

Research output: Contribution to conference › Paper › peer-review

Abstract

Fabrication of high aspect ratio structures of complex perovskite materials using photoresist templates is reported in this work. Water based (Pb,Ba)TiO₃ (PBT) and 2-methoxyethanol based PbZr _0.52Ti_0.48O₃ (PZT) sol-gel precursor solutions were used to infiltrate prefabricated photoresist templates on various substrates. The solutions were deposited by vacuum infiltration assisted dip coating. Pyrolysis and the crystallization of the pillars were performed after removal of the gel layer formed on the surface of the mold. During crystallization process of photoresist was removed simultaneously. Various aspect ratio PZT and PBT structures were obtained.

Original language	English (US)
Pages	258-261
Number of pages	4
State	Published - Dec 6 2005
Event	2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S) - Montreal, Canada Duration: Aug 23 2004 → Aug 27 2004

Other

Other	2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S)
Country/Territory	Canada
City	Montreal
Period	8/23/04 → 8/27/04

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

Mina, I. G., Bharadwaja, S. S. N., Raviprakash, J., Trolier-McKinstry, S., Saldanha, N., & Mayer, T. (2005). Molding of high aspect ratio ferroelectric microstructures. 258-261. Paper presented at 2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S), Montreal, Canada.

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title = "Molding of high aspect ratio ferroelectric microstructures",

abstract = "Fabrication of high aspect ratio structures of complex perovskite materials using photoresist templates is reported in this work. Water based (Pb,Ba)TiO3 (PBT) and 2-methoxyethanol based PbZr 0.52Ti0.48O3 (PZT) sol-gel precursor solutions were used to infiltrate prefabricated photoresist templates on various substrates. The solutions were deposited by vacuum infiltration assisted dip coating. Pyrolysis and the crystallization of the pillars were performed after removal of the gel layer formed on the surface of the mold. During crystallization process of photoresist was removed simultaneously. Various aspect ratio PZT and PBT structures were obtained.",

author = "Mina, {I. G.} and Bharadwaja, {S. S.N.} and J. Raviprakash and S. Trolier-McKinstry and N. Saldanha and T. Mayer",

year = "2005",

month = dec,

day = "6",

language = "English (US)",

pages = "258--261",

note = "2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S) ; Conference date: 23-08-2004 Through 27-08-2004",

}

Mina, IG, Bharadwaja, SSN, Raviprakash, J, Trolier-McKinstry, S, Saldanha, N & Mayer, T 2005, 'Molding of high aspect ratio ferroelectric microstructures', Paper presented at 2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S), Montreal, Canada, 8/23/04 - 8/27/04 pp. 258-261.

Molding of high aspect ratio ferroelectric microstructures. / Mina, I. G.; Bharadwaja, S. S.N.; Raviprakash, J. et al.
2005. 258-261 Paper presented at 2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S), Montreal, Canada.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Molding of high aspect ratio ferroelectric microstructures

AU - Mina, I. G.

AU - Bharadwaja, S. S.N.

AU - Raviprakash, J.

AU - Trolier-McKinstry, S.

AU - Saldanha, N.

AU - Mayer, T.

PY - 2005/12/6

Y1 - 2005/12/6

N2 - Fabrication of high aspect ratio structures of complex perovskite materials using photoresist templates is reported in this work. Water based (Pb,Ba)TiO3 (PBT) and 2-methoxyethanol based PbZr 0.52Ti0.48O3 (PZT) sol-gel precursor solutions were used to infiltrate prefabricated photoresist templates on various substrates. The solutions were deposited by vacuum infiltration assisted dip coating. Pyrolysis and the crystallization of the pillars were performed after removal of the gel layer formed on the surface of the mold. During crystallization process of photoresist was removed simultaneously. Various aspect ratio PZT and PBT structures were obtained.

AB - Fabrication of high aspect ratio structures of complex perovskite materials using photoresist templates is reported in this work. Water based (Pb,Ba)TiO3 (PBT) and 2-methoxyethanol based PbZr 0.52Ti0.48O3 (PZT) sol-gel precursor solutions were used to infiltrate prefabricated photoresist templates on various substrates. The solutions were deposited by vacuum infiltration assisted dip coating. Pyrolysis and the crystallization of the pillars were performed after removal of the gel layer formed on the surface of the mold. During crystallization process of photoresist was removed simultaneously. Various aspect ratio PZT and PBT structures were obtained.

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M3 - Paper

AN - SCOPUS:28144436588

SP - 258

EP - 261

T2 - 2004 14th IEEE International Symposium on Applications of Ferroelectrics, ISAF-04. A Conference of the IEEE Ultrasonics, Feroelectrics, and Frequency Control Society (UFFC-S)

Y2 - 23 August 2004 through 27 August 2004

ER -

Molding of high aspect ratio ferroelectric microstructures

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All Science Journal Classification (ASJC) codes

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