Abstract
Molecular depth profiling of organic overlayers was performed using a mass selected fullerene ion beam in conjunction with time-of-flight (TOF-SIMS) mass spectrometry. The characteristics of depth profiles acquired on a 300-nm trehalose film on Si were studied as a function of the impact kinetic energy and charge state of the C 60 projectile ions. We find that the achieved depth resolution depends only weakly upon energy.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 959-961 |
| Number of pages | 3 |
| Journal | Applied Surface Science |
| Volume | 255 |
| Issue number | 4 |
| DOIs | |
| State | Published - Dec 15 2008 |
All Science Journal Classification (ASJC) codes
- General Chemistry
- Condensed Matter Physics
- General Physics and Astronomy
- Surfaces and Interfaces
- Surfaces, Coatings and Films
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