Molecular depth profiling using a C₆₀ cluster beam: The role of impact energy

Keyphrases

• Impact Energy 100%
• Cluster Beam 100%
• Molecular Depth Profiling 100%
• Mass Spectrometry 50%
• Time-of-flight Secondary Ion Mass Spectrometry (ToF-SIMS) 50%
• Overlayer 50%
• Chemical Damage 50%
• Trehalose 50%
• Debris 50%
• Mass Selection 50%
• Kinetic Effects 50%
• Depth Profile Analysis 50%
• Ion-induced 50%
• Sputter Depth Profiling 50%
• C60 Ion 50%
• Sputtering Erosion 50%

Chemistry

• Depth Profiling 100%
• Time-of-Flight Secondary Ion Mass Spectrometry 50%
• Ion Beam 50%
• Mass Spectrometry 50%
• Silicon 50%
• Chemical Kinetics Characteristics 50%
• Trehalose 50%