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Molecular depth profiling with cluster ion beams
Juan Cheng
, Andreas Wucher
, Nicholas Winograd
Materials Research Institute (MRI)
Chemistry
Research output
:
Contribution to journal
›
Article
›
peer-review
186
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Scopus citations
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Keyphrases
Trehalose
100%
Cluster Ion Beam
100%
Molecular Depth Profiling
100%
Layer Thickness
66%
Sputtering Yield
66%
Bombardment
66%
Depth Profile
66%
Altered Layer
66%
Damage Cross Section
66%
Si Substrate
33%
Information Content
33%
Thin Substrate
33%
Mass Spectra
33%
Molecular Dynamics Calculations
33%
Secondary Ion
33%
Molecular Ions
33%
Chemical Damage
33%
Surface Layer
33%
Cluster Projectiles
33%
Simple Analytical Model
33%
Experimental Parameters
33%
C60+
33%
Sputtering Process
33%
Damage Accumulation
33%
Ion Dose
33%
Ion Intensity
33%
Chemical System
33%
Molecular Thin Films
33%
Chemistry
Ion Beam
100%
Cluster Ion
100%
Depth Profiling
100%
Trehalose
100%
Peptide
100%
Molecular Dynamics
33%
Molecular Ion
33%
Energetics
33%
Secondary Ion Mass Spectrum
33%
Physics
Thin Films
100%
Ion Beam
100%
Peptide
100%
Molecular Dynamics
33%
Mass Spectrum
33%
Surface Layers
33%
Energetics
33%
Molecular Ion
33%
Medicine and Dentistry
Trehalose
100%
Peptide
100%
Energy Transfer
33%