TY - JOUR
T1 - Molecular dynamics simulation of thin film nucleation through molecular cluster beam deposition
T2 - Effect of incident angle
AU - Hu, Yanhong
AU - Sinnott, Susan B.
N1 - Funding Information:
The work is supported by the National Science Foundation through grant (CHE-9708049). The authors thank Boris Ni for many helpful discussions.
PY - 2002/10
Y1 - 2002/10
N2 - Deposition of organic cluster beams on solid substrates leads to the creation of thin films through rapid chemical reactions, which makes the process suitable for study by molecular dynamics (MD) simulations. In this work, angular effects of molecular organic beam deposition are studied extensively through classical MD simulations. The reactive empirical bond potential parameterized by Brenner is used. The specific system that is examined consists of an ethylene molecular cluster beam that is deposited on a hydrogen-terminated diamond (1 1 1) substrate at room temperature. The beam impacts the substrate along two crystallographic orientations at incident angles of 0°, 15°, 45° and 60° from the surface normal. Two sets of conditions are considered: one where the total incident energy is constant and one where the momentum normal to the surface is constant. The results are seen to depend on the total energy and incident angle and to be independent of crystallographic orientation.
AB - Deposition of organic cluster beams on solid substrates leads to the creation of thin films through rapid chemical reactions, which makes the process suitable for study by molecular dynamics (MD) simulations. In this work, angular effects of molecular organic beam deposition are studied extensively through classical MD simulations. The reactive empirical bond potential parameterized by Brenner is used. The specific system that is examined consists of an ethylene molecular cluster beam that is deposited on a hydrogen-terminated diamond (1 1 1) substrate at room temperature. The beam impacts the substrate along two crystallographic orientations at incident angles of 0°, 15°, 45° and 60° from the surface normal. Two sets of conditions are considered: one where the total incident energy is constant and one where the momentum normal to the surface is constant. The results are seen to depend on the total energy and incident angle and to be independent of crystallographic orientation.
UR - http://www.scopus.com/inward/record.url?scp=0036798778&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0036798778&partnerID=8YFLogxK
U2 - 10.1016/S0168-583X(02)01135-7
DO - 10.1016/S0168-583X(02)01135-7
M3 - Article
AN - SCOPUS:0036798778
SN - 0168-583X
VL - 195
SP - 329
EP - 338
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 3-4
ER -