Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au3 and C60 clusters

Robert Paruch; Lukasz Rzeznik; Michael F. Russo; Barbara J. Garrison; Zbigniew Postawa

doi:10.1021/jp906139d

Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au₃ and C₆₀ clusters

Robert Paruch, Lukasz Rzeznik, Michael F. Russo, Barbara J. Garrison, Zbigniew Postawa

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27 Scopus citations

Abstract

Molecular dynamics computer simulations are employed to investigate, at the atomic scale, the process of Ag(111) surface erosion stimulated by continuous bombardment by 20-keV Au₃ and C₆₀ clusters at 0° and 70° impact angles. The surface modification, the total sputtering yield, and the kinetic energy and angular distributions of ejected species are calculated at fluences ranging from 0 up to ∼3 × 10¹³ impacts/cm ². It is shown that Au₃ irradiation leads to a more corrugated surface as compared to C60 bombardment. The development of the surface topography and aggregated alteration of the bulk have a significant influence on the total sputtering yield and the angular spectra, whereas the shape of the kinetic energy distributions are not sensitive to the modification of the sample morphology.

Original language	English (US)
Pages (from-to)	5532-5539
Number of pages	8
Journal	Journal of Physical Chemistry C
Volume	114
Issue number	12
DOIs	https://doi.org/10.1021/jp906139d
State	Published - Apr 1 2010

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
General Energy
Physical and Theoretical Chemistry
Surfaces, Coatings and Films

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10.1021/jp906139d

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title = "Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au3 and C60 clusters",

abstract = "Molecular dynamics computer simulations are employed to investigate, at the atomic scale, the process of Ag(111) surface erosion stimulated by continuous bombardment by 20-keV Au3 and C60 clusters at 0° and 70° impact angles. The surface modification, the total sputtering yield, and the kinetic energy and angular distributions of ejected species are calculated at fluences ranging from 0 up to ∼3 × 1013 impacts/cm 2. It is shown that Au3 irradiation leads to a more corrugated surface as compared to C60 bombardment. The development of the surface topography and aggregated alteration of the bulk have a significant influence on the total sputtering yield and the angular spectra, whereas the shape of the kinetic energy distributions are not sensitive to the modification of the sample morphology.",

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T1 - Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au3 and C60 clusters

AU - Paruch, Robert

AU - Rzeznik, Lukasz

AU - Russo, Michael F.

AU - Garrison, Barbara J.

AU - Postawa, Zbigniew

PY - 2010/4/1

Y1 - 2010/4/1

N2 - Molecular dynamics computer simulations are employed to investigate, at the atomic scale, the process of Ag(111) surface erosion stimulated by continuous bombardment by 20-keV Au3 and C60 clusters at 0° and 70° impact angles. The surface modification, the total sputtering yield, and the kinetic energy and angular distributions of ejected species are calculated at fluences ranging from 0 up to ∼3 × 1013 impacts/cm 2. It is shown that Au3 irradiation leads to a more corrugated surface as compared to C60 bombardment. The development of the surface topography and aggregated alteration of the bulk have a significant influence on the total sputtering yield and the angular spectra, whereas the shape of the kinetic energy distributions are not sensitive to the modification of the sample morphology.

AB - Molecular dynamics computer simulations are employed to investigate, at the atomic scale, the process of Ag(111) surface erosion stimulated by continuous bombardment by 20-keV Au3 and C60 clusters at 0° and 70° impact angles. The surface modification, the total sputtering yield, and the kinetic energy and angular distributions of ejected species are calculated at fluences ranging from 0 up to ∼3 × 1013 impacts/cm 2. It is shown that Au3 irradiation leads to a more corrugated surface as compared to C60 bombardment. The development of the surface topography and aggregated alteration of the bulk have a significant influence on the total sputtering yield and the angular spectra, whereas the shape of the kinetic energy distributions are not sensitive to the modification of the sample morphology.

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Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au₃ and C₆₀ clusters

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