Monolithic MEMS optical switch with amplified out-of-plane angular motion

D. López; M. E. Simon; F. Pardo; V. Aksyuk; F. Klemens; R. Cirelli; D. T. Neilson; H. Shea; T. Sorsch; E. Ferry; O. Nalamasu; P. L. Gammel

doi:10.1109/OMEMS.2002.1031494

Monolithic MEMS optical switch with amplified out-of-plane angular motion

D. López, M. E. Simon, F. Pardo, V. Aksyuk, F. Klemens, R. Cirelli, D. T. Neilson, H. Shea, T. Sorsch, E. Ferry, O. Nalamasu, P. L. Gammel

Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

25 Scopus citations

Abstract

We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.

Original language	English (US)
Title of host publication	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	165-166
Number of pages	2
ISBN (Electronic)	0780375955, 9780780375956
DOIs	https://doi.org/10.1109/OMEMS.2002.1031494
State	Published - 2002
Event	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland Duration: Aug 20 2002 → Aug 23 2002

Publication series

Name	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Country/Territory	Switzerland
City	Lugano
Period	8/20/02 → 8/23/02

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Control and Systems Engineering
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2002.1031494

Cite this

López, D., Simon, M. E., Pardo, F., Aksyuk, V., Klemens, F., Cirelli, R., Neilson, D. T., Shea, H., Sorsch, T., Ferry, E., Nalamasu, O., & Gammel, P. L. (2002). Monolithic MEMS optical switch with amplified out-of-plane angular motion. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 165-166). Article 1031494 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2002.1031494

López, D. ; Simon, M. E. ; Pardo, F. et al. / Monolithic MEMS optical switch with amplified out-of-plane angular motion. 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. pp. 165-166 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

@inproceedings{4f0841af2d0d4dfa94d549cb2582bf61,

title = "Monolithic MEMS optical switch with amplified out-of-plane angular motion",

abstract = "We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.",

author = "D. L{\'o}pez and Simon, {M. E.} and F. Pardo and V. Aksyuk and F. Klemens and R. Cirelli and Neilson, {D. T.} and H. Shea and T. Sorsch and E. Ferry and O. Nalamasu and Gammel, {P. L.}",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.; IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 ; Conference date: 20-08-2002 Through 23-08-2002",

year = "2002",

doi = "10.1109/OMEMS.2002.1031494",

language = "English (US)",

series = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "165--166",

booktitle = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",

address = "United States",

}

López, D, Simon, ME, Pardo, F, Aksyuk, V, Klemens, F, Cirelli, R, Neilson, DT, Shea, H, Sorsch, T, Ferry, E, Nalamasu, O & Gammel, PL 2002, Monolithic MEMS optical switch with amplified out-of-plane angular motion. in 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest., 1031494, 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest, Institute of Electrical and Electronics Engineers Inc., pp. 165-166, IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002, Lugano, Switzerland, 8/20/02. https://doi.org/10.1109/OMEMS.2002.1031494

Monolithic MEMS optical switch with amplified out-of-plane angular motion. / López, D.; Simon, M. E.; Pardo, F. et al.
2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. p. 165-166 1031494 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Monolithic MEMS optical switch with amplified out-of-plane angular motion

AU - López, D.

AU - Simon, M. E.

AU - Pardo, F.

AU - Aksyuk, V.

AU - Klemens, F.

AU - Cirelli, R.

AU - Neilson, D. T.

AU - Shea, H.

AU - Sorsch, T.

AU - Ferry, E.

AU - Nalamasu, O.

AU - Gammel, P. L.

PY - 2002

Y1 - 2002

N2 - We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.

AB - We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.

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DO - 10.1109/OMEMS.2002.1031494

M3 - Conference contribution

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T3 - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

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BT - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002

Y2 - 20 August 2002 through 23 August 2002

ER -

López D, Simon ME, Pardo F, Aksyuk V, Klemens F, Cirelli R et al. Monolithic MEMS optical switch with amplified out-of-plane angular motion. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc. 2002. p. 165-166. 1031494. (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). doi: 10.1109/OMEMS.2002.1031494

Monolithic MEMS optical switch with amplified out-of-plane angular motion

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