Monolithic MEMS optical switch with amplified out-of-plane angular motion

D. López; M. E. Simon; F. Pardo; V. Aksyuk; F. Klemens; R. Cirelli; D. T. Neilson; H. Shea; T. Sorsch; E. Ferry; O. Nalamasu; P. L. Gammel

doi:10.1109/OMEMS.2002.1031494

Monolithic MEMS optical switch with amplified out-of-plane angular motion

D. López
, M. E. Simon
, F. Pardo
, V. Aksyuk
, F. Klemens
, R. Cirelli
, D. T. Neilson
, H. Shea
, T. Sorsch
, E. Ferry
, O. Nalamasu
, P. L. Gammel

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

26 Scopus citations

Abstract

We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.

Original language	English (US)
Title of host publication	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	165-166
Number of pages	2
ISBN (Electronic)	0780375955, 9780780375956
DOIs	https://doi.org/10.1109/OMEMS.2002.1031494
State	Published - 2002
Event	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland Duration: Aug 20 2002 → Aug 23 2002

Publication series

Name	2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
Country/Territory	Switzerland
City	Lugano
Period	8/20/02 → 8/23/02

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Control and Systems Engineering
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMEMS.2002.1031494

Cite this

López, D., Simon, M. E., Pardo, F., Aksyuk, V., Klemens, F., Cirelli, R., Neilson, D. T., Shea, H., Sorsch, T., Ferry, E., Nalamasu, O., & Gammel, P. L. (2002). Monolithic MEMS optical switch with amplified out-of-plane angular motion. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest (pp. 165-166). Article 1031494 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2002.1031494

López, D. ; Simon, M. E. ; Pardo, F. et al. / Monolithic MEMS optical switch with amplified out-of-plane angular motion. 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. pp. 165-166 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

@inproceedings{4f0841af2d0d4dfa94d549cb2582bf61,

title = "Monolithic MEMS optical switch with amplified out-of-plane angular motion",

abstract = "We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.",

author = "D. L{\'o}pez and Simon, \{M. E.\} and F. Pardo and V. Aksyuk and F. Klemens and R. Cirelli and Neilson, \{D. T.\} and H. Shea and T. Sorsch and E. Ferry and O. Nalamasu and Gammel, \{P. L.\}",

note = "Publisher Copyright: {\textcopyright} 2002 IEEE. Copyright: Copyright 2017 Elsevier B.V., All rights reserved.; IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 ; Conference date: 20-08-2002 Through 23-08-2002",

year = "2002",

doi = "10.1109/OMEMS.2002.1031494",

language = "English (US)",

series = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "165--166",

booktitle = "2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest",

address = "United States",

}

López, D, Simon, ME, Pardo, F, Aksyuk, V, Klemens, F, Cirelli, R, Neilson, DT, Shea, H, Sorsch, T, Ferry, E, Nalamasu, O & Gammel, PL 2002, Monolithic MEMS optical switch with amplified out-of-plane angular motion. in 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest., 1031494, 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest, Institute of Electrical and Electronics Engineers Inc., pp. 165-166, IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002, Lugano, Switzerland, 8/20/02. https://doi.org/10.1109/OMEMS.2002.1031494

Monolithic MEMS optical switch with amplified out-of-plane angular motion. / López, D.; Simon, M. E.; Pardo, F. et al.
2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc., 2002. p. 165-166 1031494 (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Monolithic MEMS optical switch with amplified out-of-plane angular motion

AU - López, D.

AU - Simon, M. E.

AU - Pardo, F.

AU - Aksyuk, V.

AU - Klemens, F.

AU - Cirelli, R.

AU - Neilson, D. T.

AU - Shea, H.

AU - Sorsch, T.

AU - Ferry, E.

AU - Nalamasu, O.

AU - Gammel, P. L.

PY - 2002

Y1 - 2002

N2 - We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.

AB - We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.

UR - https://www.scopus.com/pages/publications/84963716143

UR - https://www.scopus.com/pages/publications/84963716143#tab=citedBy

U2 - 10.1109/OMEMS.2002.1031494

DO - 10.1109/OMEMS.2002.1031494

M3 - Conference contribution

AN - SCOPUS:84963716143

T3 - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

SP - 165

EP - 166

BT - 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002

Y2 - 20 August 2002 through 23 August 2002

ER -

López D, Simon ME, Pardo F, Aksyuk V, Klemens F, Cirelli R et al. Monolithic MEMS optical switch with amplified out-of-plane angular motion. In 2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest. Institute of Electrical and Electronics Engineers Inc. 2002. p. 165-166. 1031494. (2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest). doi: 10.1109/OMEMS.2002.1031494

Monolithic MEMS optical switch with amplified out-of-plane angular motion

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All Science Journal Classification (ASJC) codes

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