Monolithic MEMS optical switch with amplified out-of-plane angular motion

D. López, M. E. Simon, F. Pardo, V. Aksyuk, F. Klemens, R. Cirelli, D. T. Neilson, H. Shea, T. Sorsch, E. Ferry, O. Nalamasu, P. L. Gammel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

25 Scopus citations

Fingerprint

Dive into the research topics of 'Monolithic MEMS optical switch with amplified out-of-plane angular motion'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds