Monolithic MEMS optical switch with amplified out-of-plane angular motion
- D. López
- , M. E. Simon
- , F. Pardo
- , V. Aksyuk
- , F. Klemens
- , R. Cirelli
- , D. T. Neilson
- , H. Shea
- , T. Sorsch
- , E. Ferry
- , O. Nalamasu
- , P. L. Gammel
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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