Monolithic MEMS optical switch with amplified out-of-plane angular motion

D. López, M. E. Simon, F. Pardo, V. Aksyuk, F. Klemens, R. Cirelli, D. T. Neilson, H. Shea, T. Sorsch, E. Ferry, O. Nalamasu, P. L. Gammel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

25 Scopus citations

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