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MP-A7 Fabrication of Devices with Submicrometer Dimensions Using a Selective Edge Plating Technique and Conventional Photolithography

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)1829
Number of pages1
JournalIEEE Transactions on Electron Devices
Volume26
Issue number11
DOIs
StatePublished - Nov 1979

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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