Fingerprint
Dive into the research topics of 'Multi-layered nanocavities in silicon with sequential helium implantation/anneal'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Multi-layered nanocavities in silicon with sequential helium implantation/anneal
Sanjay Rangan, S. Ashok, G. Chen, D. Theodore
Research output: Contribution to journal › Conference article › peer-review
14
Scopus
citations