Abstract
This work outlines the material processing technique used to fabricate a multilayer ferroelectric material BST (Barium Strontium Titanate). The composition and thickness of each layer can be controlled such that a tunable multilayer frequency-selective device can be fabricated. The BST materials can be processed by a combination of sol-gel powder processing, tape-casting and microwave processing to yield a multilayer composite material having variable and tunable dielectric properties. For thinner layers, microwave assisted plasma deposition is used to prepare thin film BST from a sol-gel slurry.
Original language | English (US) |
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Pages (from-to) | 433-447 |
Number of pages | 15 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 2189 |
DOIs | |
State | Published - May 1 1994 |
Event | 1994 North American Conference on Smart Structures and Materials: Smart Materials - Orlando, United States Duration: Feb 13 1994 → Feb 18 1994 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering