Abstract
This work outlines the material processing technique used to fabricate a multilayer ferroelectric material BST (Barium Strontium Titanate). The composition and thickness of each layer can be controlled such that a tunable multilayer frequency-selective device can be fabricated. The BST materials can be processed by a combination of sol-gel powder processing, tape-casting and microwave processing to yield a multilayer composite material having variable and tunable dielectric properties. For thinner layers, microwave assisted plasma deposition is used to prepare thin film BST from a sol-gel slurry.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 433-447 |
| Number of pages | 15 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 2189 |
| DOIs | |
| State | Published - May 1 1994 |
| Event | 1994 North American Conference on Smart Structures and Materials: Smart Materials - Orlando, United States Duration: Feb 13 1994 → Feb 18 1994 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering