Nanoindentation and nanowear studies of sputter-deposited ultrathin tin oxide films on glass substrates

J. G. Wang, M. E. Stahley, C. G. Pantano, D. H. Yang, T. Anderson, L. Kuhn

Research output: Contribution to journalArticlepeer-review


Tin oxide thin films on glass are used in a variety of applications ranging from transparent conductors to coupling layers to wear resistant coatings. The mechanical properties and wear resistance are crucial to most applications of tin oxide films. In the present study, ultrathin tin oxide films were sputter-deposited on the two different glass substrates. Nanoindentation, nanoscratch and nanowear experiments were performed on the tin oxide films with different thickness using a Hysitron TriboScope® at different loads. Hardness and Young's modulus of elasticity were determined from the depth sensing load-displacement data. A lower friction coefficient was observed on the thinner film using the ramping load scratch test. Critical loads were determined by the ramping load scratch test and multi-slide nanowear tests on the tin oxide film deposited on the alkali contained commercial float glass (LOF-P16) glass. Discussion on the effect of surface chemistry on the mechanical properties was made.

Original languageEnglish (US)
Pages (from-to)85-90
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 2002

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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