TY - GEN
T1 - Nanometer gaps by feedback-controlled electromigration
AU - Shih, V. C.Y.
AU - Zheng, Siyang
AU - Chang, A.
AU - Tai, Yu Chong
N1 - Publisher Copyright:
© 2003 IEEE.
PY - 2003
Y1 - 2003
N2 - Nanometer-sized gap (or nanogap) is one of the most fundamental devices in the nanotechnology field. Park et. al., first proposed the open-circuit electromigration method to fabricate nanogaps, but the process is only repeatable if Au film is thinner than 20 nm. To overcome these drawbacks, we develop the feedback-controlled electromigration process and find that not only repeatable nanogaps can be created in thicker film (up to 120 nm or thicker in our experiments), but superior gap size control and topology are obtained. Moreover, we develop two new approaches to make free-standing nanogaps. The tunneling current between the nanogap electrodes was used to demonstrate a sensitive pressure and/or temperature sensor. Finally, we also develop a simple thermal-expansion method to measure the gap size without needing delicate instrument.
AB - Nanometer-sized gap (or nanogap) is one of the most fundamental devices in the nanotechnology field. Park et. al., first proposed the open-circuit electromigration method to fabricate nanogaps, but the process is only repeatable if Au film is thinner than 20 nm. To overcome these drawbacks, we develop the feedback-controlled electromigration process and find that not only repeatable nanogaps can be created in thicker film (up to 120 nm or thicker in our experiments), but superior gap size control and topology are obtained. Moreover, we develop two new approaches to make free-standing nanogaps. The tunneling current between the nanogap electrodes was used to demonstrate a sensitive pressure and/or temperature sensor. Finally, we also develop a simple thermal-expansion method to measure the gap size without needing delicate instrument.
UR - http://www.scopus.com/inward/record.url?scp=84944724562&partnerID=8YFLogxK
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U2 - 10.1109/SENSOR.2003.1217069
DO - 10.1109/SENSOR.2003.1217069
M3 - Conference contribution
AN - SCOPUS:84944724562
T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
SP - 1530
EP - 1533
BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Y2 - 8 June 2003 through 12 June 2003
ER -